JPH0344641B2 - - Google Patents
Info
- Publication number
- JPH0344641B2 JPH0344641B2 JP62035334A JP3533487A JPH0344641B2 JP H0344641 B2 JPH0344641 B2 JP H0344641B2 JP 62035334 A JP62035334 A JP 62035334A JP 3533487 A JP3533487 A JP 3533487A JP H0344641 B2 JPH0344641 B2 JP H0344641B2
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- light source
- filter
- alignment mark
- pupil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000001747 pupil Anatomy 0.000 claims description 29
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000005452 bending Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035334A JPS62201302A (ja) | 1987-02-18 | 1987-02-18 | アライメントマ−ク検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62035334A JPS62201302A (ja) | 1987-02-18 | 1987-02-18 | アライメントマ−ク検出方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58090194A Division JPS58213207A (ja) | 1983-05-23 | 1983-05-23 | アライメントマーク検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62201302A JPS62201302A (ja) | 1987-09-05 |
| JPH0344641B2 true JPH0344641B2 (en]) | 1991-07-08 |
Family
ID=12438937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035334A Granted JPS62201302A (ja) | 1987-02-18 | 1987-02-18 | アライメントマ−ク検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201302A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3796065B1 (en) * | 2019-09-20 | 2025-02-19 | Leica Microsystems CMS GmbH | Light sheet microscope with exchangeable optical elements |
-
1987
- 1987-02-18 JP JP62035334A patent/JPS62201302A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62201302A (ja) | 1987-09-05 |
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